Yayınlanmış 1 Ocak 2012
| Sürüm v1
Dergi makalesi
Açık
Comparison of the performance of the next generation of optical interferometers
Yazarlar/Oluşturanlar
- 1. Ist Nazl Ric Metrol INRIM, Turin, Italy
- 2. NPL, Teddington TW11 0LW, Middx, England
- 3. CMI, Prague, Czech Republic
- 4. TUBITAK, UME, TR-41470 Gebze, Turkey
- 5. PTB, D-38116 Braunschweig, Germany
- 6. Ctr Metrol & Accreditat MIKES, FI-02151 Espoo, Finland
Açıklama
Six European National Measurement Institutes (NMIs) have joined forces within the European Metrology Research Programme funded project NANOTRACE to develop the next generation of optical interferometers having a target uncertainty of 10 pm. These are needed for NMIs to provide improved traceable dimensional metrology that can be disseminated to the wider nanotechnology community, thereby supporting the growth in nanotechnology. Several approaches were followed in order to develop the interferometers. This paper briefly describes the different interferometers developed by the various partners and presents the results of a comparison of performance of the optical interferometers using an x-ray interferometer to generate traceable reference displacements.
Dosyalar
bib-35381f12-c293-4334-8e39-872de558126c.txt
Dosyalar
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